File:20 nm width stochastic failure probability.png
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20_nm_width_stochastic_failure_probability.png (480 × 288 pixels, file size: 10 KB, MIME type: image/png)
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[edit]Description20 nm width stochastic failure probability.png |
English: The probability of stochastic failure is plotted vs. pitch for 20 nm space widths at an EUV dose of ~30 mJ/cm2.[1] Points below 0.5 ppm are extrapolated. When the distance between exposed 20 nm spaces exceeds about 25-30 nm, the failure probability starts to increase. There is a contribution from secondary electron straggling in the ~20 nm range.[2] |
Date | |
Source | Excel |
Author | Guiding light |
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[edit]Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
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[edit]The original description page was here. All following user names refer to en.wikipedia.
Date/Time | Dimensions | User | Comment |
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2018-10-21 00:57:28 | 481 × 288 | Guiding light | |
2018-10-20 16:14:10 | 481 × 288 | Guiding light | |
2018-10-20 15:32:55 | 481 × 287 | Guiding light | |
2018-10-20 13:36:11 | 481 × 288 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 17:49, 23 February 2019 | 480 × 288 (10 KB) | Guiding light (talk | contribs) | x-axis range | |
17:45, 23 February 2019 | 479 × 288 (8 KB) | Guiding light (talk | contribs) | Limited to 20 nm | ||
14:18, 15 December 2018 | 481 × 288 (10 KB) | I love rpgs (talk | contribs) | Transferred from en.wikipedia (MTC!) (1.1.0) |
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