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Goetz et al., 2009 - Google Patents

Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor

Goetz et al., 2009

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Document ID
6256235664819939980
Author
Goetz M
Messner S
Ashauer M
Zengerle R
Publication year
Publication venue
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and Microsystems Conference

External Links

Snippet

We present a system approach for precise liquid dosing at low costs. The highly integrated system operates at flow rates of 0-10 mL/min and with a back pressure of 0-75 kPa. It enables a flow with significantly reduced pulsation and a maximum deviation of 1.5%. The …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F04—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micro pumps
    • F04B43/046—Micro pumps with piezo-electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F04—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive

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