[go: nahoru, domu]

Knight et al., 2003 - Google Patents

Fabrication and characterization of cMUTs for forward looking intravascular ultrasound imaging

Knight et al., 2003

Document ID
9654482071339597049
Author
Knight J
Degertekin F
Publication year
Publication venue
IEEE Symposium on Ultrasonics, 2003

External Links

Snippet

We have fabricated ring annular capacitive micromachined ultrasonic transducer (cMUT) arrays for forward looking IVUS operation in the 10 to 20MHz range with a maximum process temperature of 250/spl deg/C. Our process uses a low stress plasma enhanced …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/895—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques characterised by the transmitted frequency spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezo-electric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52046—Techniques for image enhancement involving transmitter or receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes

Similar Documents

Publication Publication Date Title
Degertekin et al. Annular-ring CMUT arrays for forward-looking IVUS: Transducer characterization and imaging
Oralkan et al. Capacitive micromachined ultrasonic transducers: Next-generation arrays for acoustic imaging?
US6503204B1 (en) Two-dimensional ultrasonic transducer array having transducer elements in a non-rectangular or hexagonal grid for medical diagnostic ultrasonic imaging and ultrasound imaging system using same
Caronti et al. Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging
US20070035204A1 (en) Dual frequency band ultrasound transducer arrays
JP2019522925A (en) Broadband ultrasonic transducer
Zhang et al. FEM simulation and comparison of PMN-PT single crystals based phased array ultrasonic transducer by alternating current poling and direct current poling
Knight et al. Fabrication and characterization of cMUTs for forward looking intravascular ultrasound imaging
Engholm et al. Probe development of CMUT and PZT row–column-addressed 2-D arrays
CN105411625A (en) Diagnosis and treatment integrated ultrasonic system based on cMUT (capacitive micromachining ultrasonic transducer) area array
Knight et al. Capacitive micromachined ultrasonic transducers for forward looking intravascular imaging arrays
Liu et al. A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects
Sadeghpour et al. Novel phased array piezoelectric micromachined ultrasound transducers (PMUTs) for medical imaging
Herickhoff et al. cMUT technology developments
Logan et al. 2-D CMUT wafer bonded imaging arrays with a row-column addressing scheme
Karuthedath et al. Development of ScAlN PMUTs for medical applications
Sadeghpour et al. A $128\times 1$ Phased Array Piezoelectric Micromachined Ultrasound Transducer (pMUT) for Medical Imaging
Yen et al. A dual-layer transducer array for 3-D rectilinear imaging
CN112791926A (en) Ultrasonic imaging apparatus and ultrasonic imaging system
Wagner et al. 5G-1 two approaches to electronically scanned 3D imaging using cMUTs
Wu et al. Microfabrication and characterization of dual-frequency piezoelectric micromachined ultrasonic transducers
CN214390969U (en) Ultrasonic imaging apparatus and ultrasonic imaging system
Sadeghpour et al. A novel 6 MHz phased array piezoelectric micromachined ultrasound transducer (pMUT) with 128 elements for medical imaging
Logan The design, fabrication and characterization of capacitive micromachined ultrasonic transducers for imaging applications
Wang et al. Development of backing piezoelectric micromachined ultrasonic transducer (B-PMUT) 2D array