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CN202304768U - Three-dimension measurement module and measurement instrument - Google Patents

Three-dimension measurement module and measurement instrument Download PDF

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Publication number
CN202304768U
CN202304768U CN2011204023076U CN201120402307U CN202304768U CN 202304768 U CN202304768 U CN 202304768U CN 2011204023076 U CN2011204023076 U CN 2011204023076U CN 201120402307 U CN201120402307 U CN 201120402307U CN 202304768 U CN202304768 U CN 202304768U
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China
Prior art keywords
measurement module
imaging device
dimensional measurement
projector
jacking block
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Expired - Lifetime
Application number
CN2011204023076U
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Chinese (zh)
Inventor
王瑞松
马宁
陆怡思
周鹏磊
郑剑锋
张志庭
白永刚
姜再欣
徐恺
王志会
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Anshan Xinglin Rui Light Technology Co. Ltd.
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SHENZHEN HG TECHNOLOGY CO LTD
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Abstract

The utility model provides a three-dimension measurement module, which comprises a bottom plate, a protector and an imaging device, wherein the projector and the imaging device are arranged on the bottom plate, the projector comprises projection equipment and a first objective image double-side telecentric lens, the imaging device comprises imaging equipment and a second objective image double-side telecentric lens, a connecting mechanism used for connecting a support platform is arranged on the bottom plate. The utility model also provides a corresponding three-dimension measurement instrument. The three-dimension measurement module and the three-dimension measurement instrument have high measurement precision and small error. Even when the surface height change of objects to be measured is great, the three-dimension information of the objects to be detected can also be accurately obtained. A support frame and a transverse moving platform for fixing a camera can both singly displace in the vertical direction, in addition, the projection light irradiation angle can be regulated through rotating a regulation knob in a projector regulation mechanism, and the projector and the imaging device can be conveniently regulated so that the projector and the imaging device can reach the optimal imaging effect.

Description

A kind of three-dimensional measurement module and measuring instrument
Technical field
The utility model relates to the computer vision measurement technical field, and specifically, the utility model relates to a kind of three-dimensional measurement module and measuring instrument.
Background technology
The measuring technique of microelectronics Packaging product is to develop rapidly along with the development of microelectronics industry, and the raising of measuring technique is simultaneously also advancing the development of microelectronics industry.Surface mounting technology (Surface Mounting Technology is called for short SMT) has replaced the new technology that traditional plug-in part technology becomes microelectronics Packaging at present.Though; The SMT technology has been brought high-performance, high stability and high portability to electron trade; Yet its measuring technique is had higher requirement just because of this networking, microminiaturization and integrated characteristics; The vision measuring method that only can obtain two-dimensional signal no longer can satisfy new encapsulation technology demand, and the method for three-dimensional measurement of microstructure products such as research and development a new generation micro-electron packaging device has crucial effects with device for the reliability and the quality that guarantee the novel microelectronic encapsulating products.
Existing three-dimensional measurement technology towards the novel microelectronic encapsulation field is summarized to get up to mainly contain with device: based on the measuring method of confocal imaging method, binocular stereo, based on the measuring method of laser line scanning with based on the measuring method of area-structure light projection.
The subject matter of confocal imaging method is that not only equipment price is expensive, and optical system is complicated, and adjustment is difficulty very.This formation method is extremely responsive to small shock and vibration, even if the conveyer belt on the production line also can make this formation method produce misdata, causes measuring failure.Simultaneously, the confocal imaging method detection speed is slow, so data throughout also is this technological subject matter.
The detection method of binocular stereo utilizes two cameras to gather the testee imaging from two different viewing angles, and the similar human eye of image-forming principle is to the perception of three-dimensional body.This method when measuring the object of micro-nano magnitude size just like limit: the corresponding point matching precision between (1) two video camera is difficult to guarantee; (2) the Free Surface object that does not have obvious characteristic is difficult to measure, the shape of measured device must be confirmed before measuring in advance; Fixed angle between (3) two cameras has limited the measurement range of this method.
The detection method utilization of laser line scanning scanning projecting laser line, and gather and reflex to the light beam line position on Position-Sensitive Detector or the detector array from target object, the elevation information of triangulation acquisition testee combined.This technology is very limited in " carrier band " detects, because this Technology Need laser beam is aimed at tested components and parts accurately.The size of laser facula also is a limiting factor.In addition; Laser triangulation can only the detection laser line on the height of single-point; Obtain the whole three-dimensional information of device and also need combine with scan mechanism, this has not only limited measured speed, and optics or the mechanical scanning mechanism system that makes become unusual complicated and be difficult to guarantee bearing accuracy.
Measuring method based on area-structure light technology (mainly referring to the optical projection technology) is the most promising at present automatic three-dimensional measurement technology.This detection method utilizes projection arrangement that the striped coding pattern is projected to the testee surface, and the bar graph through one or more camera collection distortion is also decoded, and in conjunction with stereovision technique the testee three-dimensional appearance is rebuild.This measuring method is body surface to be encoded as characteristic with the phase value of striped, so the single face data throughout is big, combines stereovision technique again, can realize high-precision measurement in theory.Yet, when the microelectronics Packaging product is carried out actual measurement, find that there is certain error in the measurement result of existing measuring equipment based on area-structure light technology, especially when the bigger object of surface measurements fluctuating gradient, the error of measurement result is bigger.On the other hand, for 3 D measuring instrument,, before measurement, need to regulate the position of projection arrangement and camera for reaching best imaging effect based on the area-structure light technology.
Therefore, current press for a kind of be suitable for the bigger object of surface measurements fluctuating gradient, easy to use fast, the high precision three-dimensional measurement appearance.Simultaneously, also press for a kind of can the flexible projection arrangement and the three-dimensional measurement module and the measuring instrument based on the area-structure light technology of camera position.
The utility model content
A purpose of the utility model provide a kind of measuring error very little fast, high precision three-dimensional measurement module and measuring instrument, this three-dimensional measurement module and measuring instrument are particularly suitable for the bigger object of surface measurements fluctuating gradient.
Another purpose of the utility model provides a kind of use can the flexible projection arrangement and the three-dimensional measurement module and the measuring instrument based on the area-structure light technology of the position of camera.
For realizing above-mentioned utility model purpose; The utility model provides a kind of three-dimensional measurement module; Comprise base plate and be installed in projection arrangement and the imaging device on the said base plate; Said projection arrangement comprises the projector equipment and the first image bilateral telecentric mirror head, and said imaging device comprises imaging device and terrium quid as bilateral telecentric mirror head, and said base plate is provided with the bindiny mechanism that is used to connect support platform.
Wherein, said imaging device is installed on the said base plate through translation stage.
Wherein, said translation stage adopts gear & rack structure.
Wherein, said projection arrangement is installed on the said base plate through the projection adjusting mechanism.
Wherein, said projection adjusting mechanism comprises: the clamper, fixed head, jacking block, adjusting knob and the spring that are used for the lower end of the clamping first image bilateral telecentric mirror head; Said clamper is connected on the fixed head through double-screw bolt, and the upper end and the jacking block of the said first image bilateral telecentric mirror head are fixed on the jacking block, and said fixed head is provided with the helical pitch groove; Jacking block is installed in the helical pitch groove place of said fixed head; Adjusting knob is installed on the fixed head, and the rotation of said adjusting knob the time can promote said jacking block and move along said helical pitch groove, and said spring one end is fixed on the fixed head; The other end connects said jacking block, is used to make jacking block and projection arrangement to reset.
Wherein, said projector equipment is a digital projector.
Wherein, said imaging device is a digital camera.
In addition, the utility model also provides a kind of 3 D measuring instrument, comprises support and aforementioned three-dimensional measurement module, and said three-dimensional measurement module can be done the vertical moving on the plane of placing with respect to testee on said support.
Wherein, said three-dimensional measurement module is installed on the said support through said base plate.
Compared with prior art, the utlity model has following technique effect:
1, the measuring accuracy of the utility model is high, error is little.Even the testee surface elevation changes greatly, the utility model also can accurately obtain the three-dimensional information of testee.
2, the translation stage of support of the utility model and fixed camera all can be independent along the vertical direction displacement; And in the projector adjusting mechanism; Can adjust the irradiating angle of projected light through rotating adjusting knob, the position that promptly can regulate projection arrangement and imaging device easily makes the two reach best imaging effect.
Description of drawings
Fig. 1 shows the 3 D measuring instrument synoptic diagram of an embodiment of the utility model;
Fig. 2 shows the three-dimensional measurement module diagram of an embodiment of the utility model;
Fig. 3 shows the front schematic perspective view of the projection arrangement adjusting mechanism of an embodiment of the utility model;
Fig. 4 shows the back side plane synoptic diagram of an embodiment of the utility model;
Fig. 5 shows the translation stage synoptic diagram of an embodiment of the utility model.
1 is digital projector among the figure, and 2 is digital camera, and 3 is support, and 4 is computing machine, and 5 is that terrium quid is as bilateral telecentric mirror head; 6 is the first image bilateral telecentric mirror head, and 7 is translation stage, and 8 is base plate, and 9 is clamper; 10 is fixed head, and 11 is jacking block, and 12 is adjusting knob, and 13 is spring; 14 is the helical pitch groove, and 15 is double-screw bolt, and 16 is the rack-and-pinion platform, and 17 is screw.
Embodiment
This case inventor finds: when the microelectronics Packaging product is carried out actual measurement; There is certain error in existing measurement result based on the technological measuring equipment of area-structure light; Especially when the bigger object of surface measurements fluctuating gradient, the error of its measurement result is bigger.Draw after the inventor analyzes: this error mainly is because in the existing 3 D measuring instrument based on the area-structure light technology, there are different enlargement ratios in imaging to testee at the different distance place, in process for imaging, introduces parallax and causes.Therefore, use image bilateral telecentric mirror head to replace the traditional optical camera lens in the utility model.
Below in conjunction with accompanying drawing and specific embodiment the utility model is done description further.
An embodiment according to the utility model; A kind of non-contacting 3 D measuring instrument based on the area-structure light technology is provided; As shown in Figure 1, this 3 D measuring instrument comprises: digital projector 1, digital camera 2, support 3, computing machine 4, the first image bilateral telecentric mirror head 6 and terrium quid are as bilateral telecentric mirror head 5.Wherein, The digital projector 1 and the first image bilateral telecentric mirror head 6 constitute projection arrangement; This projection arrangement links to each other with computing machine 4 through video line, and digital camera 2 constitutes imaging device with terrium quid as bilateral telecentric mirror head 5, and this imaging device links to each other with computing machine 4 through data line.Projection arrangement and imaging device are formed the three-dimensional measurement module, and whole three-dimensional measurement module is fixed on the support 3.Can be in said support 3 bottoms or other position sample stage of being provided for placing testee, also kind platform can be set but directly testee be placed on support 3 bottoms or according to actual needs testee be placed other position.Vertical moving is done on the plane that the three-dimensional measurement module can be placed with respect to testee on support 3.During measurement; The sine streak that computing machine 4 is responsible for producing the different phase shifts of different frequency is to digital projector 1; Sinusoidal grating is projected the testee surface successively to be measured; Digital camera 2 is gathered deforming stripe figure successively, through processes such as phase demodulating, phase unwrapping, three-dimensional couplings, finally obtains the three-dimensional data of testee.
As shown in Figure 2, the three-dimensional measurement module in the present embodiment also comprises base plate 8.Said base plate 8 is installed on the support 3, and can do vertical translation along the plane that said support 3 is placed with respect to testee.Digital camera 2 all is installed on the base plate 8 through translation stage 7 as bilateral telecentric mirror head 5 with terrium quid, makes digital camera 2 can do the translation motion on the plane of placing perpendicular to testee along base plate 8.The digital projector 1 and the first image bilateral telecentric mirror head 6 all are installed on the base plate 8 through the projection adjusting mechanism.Base plate 8 has the threaded hole of standard, can said three-dimensional measurement module be installed on other support platforms except that said support 3 through this threaded hole.One skilled in the art will readily appreciate that the threaded hole on the base plate 8 also can use other bindiny mechanism to replace.
Provide a kind of preferred embodiment of projection arrangement adjusting mechanism of the 3 D measuring instrument that is used for present embodiment below.Fig. 3 illustrates the front schematic perspective view of this projection arrangement adjusting mechanism preferred embodiment; Fig. 4 shows the back side plane synoptic diagram of this projection arrangement adjusting mechanism preferred embodiment.Like Fig. 3, shown in 4, this projector adjusting mechanism comprises: clamper 9, fixed head 10, jacking block 11, adjusting knob 12, spring 13 etc.Clamper 9 is used for the lower end of the clamping first image bilateral telecentric mirror head 6.Said clamper 9 is connected on the fixed head 10 through double-screw bolt 15; The upper end of the first image bilateral telecentric mirror head 6 is fixed on the jacking block 11; Jacking block 11 is installed on the fixed head 10 through screw; When rotating adjusting knob 12, can promote the first image bilateral telecentric mirror head 6; Making projection arrangement is turning axle rotation with double-screw bolt 15 in the travel range of helical pitch groove 14, thereby reaches the purpose of regulating the projected light irradiating angle.Fixedly on the fixed head 10, the other end connects said jacking block 11 to spring 13 1 ends, is used to regulate backhaul pulling force is provided, and jacking block 11 and projection arrangement are resetted.
Fig. 5 shows the preferred embodiment of the translation stage 7 of a 3 D measuring instrument that can be used for present embodiment.In this embodiment, translation stage 7 has adopted gear & rack structure.As shown in Figure 5, imaging device is fixed on the rack-and-pinion platform 16 through screw 17, and rack-and-pinion platform 16 can be done displacement movement along translation stage 7, to adjust the position of imaging device easily, makes it the imaging effect that reaches best.
In addition, one skilled in the art will readily appreciate that except digital projector that the utility model also can adopt the projector equipment of other type, except digital camera, the utility model also can adopt the imaging device of other type.
When practical operation, the measuring process of the 3 D measuring instrument of the utility model comprises following step:
A, preparation:
A1, connect digital projector 1 and computing machine 4, connect digital camera 2 computing machines 4 through data line through video line.Open the power switch of computing machine 1 and digital projector 13.
A2, regulate the position of support 3 and rack-and-pinion platform 16, and adjust the irradiating angle of projected light, to reach best projection and imaging effect through rotating adjusting knob 12.
B, demarcation: utilize the demarcation target that whole measuring instrument is demarcated, set up the relation between space physics coordinate and the imaging surface pixel coordinate, solve the inside and outside parameter of system, for follow-up three-dimensional reconstruction is made necessary preparation.
C, measurement:
C1, produce the sinusoidal grating of different phase shift different frequencies, be input to digital projector 1, this structured light patterns is projected the testee surface successively through digital projector 1 with computing machine 4.
C2, imaging system are gathered the deforming stripe figure that receives the object modulation successively, and two width of cloth images that obtain are transferred to computing machine 4. through data line
C3, utilize above-mentioned image, carry out processes such as phase demodulating and phase unwrapping, obtain the absolute phase corresponding and distribute with depth image; Phase place as the sign of seeking camera and projector corresponding point, is carried out corresponding point matching, and the inside and outside parameter of the 3 D measuring instrument that calibrates of combination is found the solution the three-dimensional data of testee again.
With respect to prior art, the utility model replaces the traditional optical camera lens with image bilateral telecentric mirror head.In the prior art; Projection arrangement and harvester use the traditional optical camera lens; The traditional optical camera lens not only exists bigger lens distortion, and there are these characteristics of different enlargement ratios in imaging because testee is at the different distance place, in process for imaging, also can introduce parallax; Therefore when the bigger object of surface measurements fluctuating gradient ratio, can great errors.The 3 D measuring instrument of the utility model is to adopt the imaging and the optical projection system of the two heart designs far away of image to make up novel measuring system; Image bilateral telecentric mirror head is as a kind of optical lens of special shape; Not only there is less lens distortion in it; And in certain object distance scope, guaranteed the constant of imaging multiplying power, correct the parallax of common imaging lens, thereby improved the measuring accuracy of 3 D measuring instrument.In addition; The utility model towards the translation stage of the support of the 3 D measuring instrument of micro-electron packaging device and fixed camera all can be independent do displacement movement along vertical direction; And in the projector adjusting mechanism; Can adjust the irradiating angle of projected light through rotating adjusting knob, make optical projection system and imaging system that so just can the aspect reach the imaging effect of the best.The utility model is particularly suitable for the three-dimensional measurement towards micro-electron packaging device, and especially the testee surface elevation changes three-dimensional measurement greatly.
What should explain at last is; Above embodiment only in order to the explanation the utility model technical scheme but not to its restriction; And on using, can extend to other modification, variation, application and embodiment, think that simultaneously all such modifications, variation, application, embodiment are in the spirit and scope of the utility model.

Claims (9)

1. three-dimensional measurement module; It is characterized in that; Comprise base plate and be installed in projection arrangement and the imaging device on the said base plate; Said projection arrangement comprises the projector equipment and the first image bilateral telecentric mirror head, and said imaging device comprises imaging device and terrium quid as bilateral telecentric mirror head, and said base plate is provided with the bindiny mechanism that is used to connect support platform.
2. three-dimensional measurement module according to claim 1 is characterized in that said imaging device is installed on the said base plate through translation stage.
3. three-dimensional measurement module according to claim 2 is characterized in that, said translation stage adopts gear & rack structure.
4. three-dimensional measurement module according to claim 2 is characterized in that said projection arrangement is installed on the said base plate through the projection adjusting mechanism.
5. three-dimensional measurement module according to claim 4 is characterized in that, said projection adjusting mechanism comprises: the clamper, fixed head, jacking block, adjusting knob and the spring that are used for the lower end of the clamping first image bilateral telecentric mirror head; Said clamper is connected on the fixed head through double-screw bolt, and the upper end and the jacking block of the said first image bilateral telecentric mirror head are fixed on the jacking block, and said fixed head is provided with the helical pitch groove; Jacking block is installed in the helical pitch groove place of said fixed head; Adjusting knob is installed on the fixed head, and the rotation of said adjusting knob the time can promote said jacking block and move along said helical pitch groove, and said spring one end is fixed on the fixed head; The other end connects said jacking block, is used to make jacking block and projection arrangement to reset.
6. three-dimensional measurement module according to claim 1 is characterized in that, said projector equipment is a digital projector.
7. three-dimensional measurement module according to claim 1 is characterized in that, said imaging device is a digital camera.
8. 3 D measuring instrument; It is characterized in that; Comprise any described three-dimensional measurement module in support and the claim 1~7, the activity of said three-dimensional measurement module is fixed on the said support, and on said support, does vertical moving with respect to plane that testee is placed.
9. 3 D measuring instrument according to claim 8 is characterized in that said base plate is installed on the said support.
CN2011204023076U 2011-10-21 2011-10-21 Three-dimension measurement module and measurement instrument Expired - Lifetime CN202304768U (en)

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102829736A (en) * 2012-09-12 2012-12-19 河北工业大学 Three-dimensional fingerprint sensing system
CN104062840A (en) * 2014-06-19 2014-09-24 广东中烟工业有限责任公司 Fixing device of 3D imaging camera and structured light source
CN104535579A (en) * 2014-12-22 2015-04-22 中国科学院长春光学精密机械与物理研究所 Etch defect detection device for steel belt grating
CN104697466A (en) * 2013-12-10 2015-06-10 株式会社三丰 Multi-axis type three-dimensional measuring apparatus
CN105136063A (en) * 2015-08-27 2015-12-09 华中科技大学 Microscope binocular stereo vision measurement device based on telecentric objectives
CN107270823A (en) * 2017-07-28 2017-10-20 深圳市兴华炜科技有限公司 A kind of steel mesh thickness detecting equipment and detection method
CN108489390A (en) * 2018-04-09 2018-09-04 辽宁昭融瑞合工业数据有限公司 A kind of 3D optical dimensions detector and optical dimensions detecting system
CN109029292A (en) * 2018-08-21 2018-12-18 孙傲 A kind of inner surface of container three-dimensional appearance non-destructive testing device and detection method
CN109186456A (en) * 2018-09-10 2019-01-11 深圳微检无忧科技有限公司 The detection of New energy electric vehicle charging hole and positioning system based on machine vision
CN109520436A (en) * 2018-11-28 2019-03-26 扬州市职业大学 A kind of butterfly spring three-dimensional dimension automatic measurement system and its measurement method based on machine vision
CN112815892A (en) * 2021-02-05 2021-05-18 西安工程大学 Novel split self-locking type movable sliding frame applied to three-coordinate measuring machine
CN113834446A (en) * 2021-11-25 2021-12-24 南京万生华态科技有限公司 Acquisition device and acquisition method for fringe projection image
CN114234848A (en) * 2021-12-15 2022-03-25 临沂星源电子衡器有限公司 Three-dimensional optical measurement is with projection arrangement who is convenient for adjust object position
CN115508280A (en) * 2022-10-09 2022-12-23 江苏宏芯亿泰智能装备有限公司 Laser measuring and positioning device

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102829736A (en) * 2012-09-12 2012-12-19 河北工业大学 Three-dimensional fingerprint sensing system
CN104697466A (en) * 2013-12-10 2015-06-10 株式会社三丰 Multi-axis type three-dimensional measuring apparatus
CN104697466B (en) * 2013-12-10 2018-04-20 株式会社三丰 Fountain type 3-D measuring apparatus
CN104062840A (en) * 2014-06-19 2014-09-24 广东中烟工业有限责任公司 Fixing device of 3D imaging camera and structured light source
CN104535579A (en) * 2014-12-22 2015-04-22 中国科学院长春光学精密机械与物理研究所 Etch defect detection device for steel belt grating
CN105136063A (en) * 2015-08-27 2015-12-09 华中科技大学 Microscope binocular stereo vision measurement device based on telecentric objectives
CN107270823A (en) * 2017-07-28 2017-10-20 深圳市兴华炜科技有限公司 A kind of steel mesh thickness detecting equipment and detection method
CN108489390A (en) * 2018-04-09 2018-09-04 辽宁昭融瑞合工业数据有限公司 A kind of 3D optical dimensions detector and optical dimensions detecting system
CN109029292A (en) * 2018-08-21 2018-12-18 孙傲 A kind of inner surface of container three-dimensional appearance non-destructive testing device and detection method
CN109186456A (en) * 2018-09-10 2019-01-11 深圳微检无忧科技有限公司 The detection of New energy electric vehicle charging hole and positioning system based on machine vision
CN109520436A (en) * 2018-11-28 2019-03-26 扬州市职业大学 A kind of butterfly spring three-dimensional dimension automatic measurement system and its measurement method based on machine vision
CN112815892A (en) * 2021-02-05 2021-05-18 西安工程大学 Novel split self-locking type movable sliding frame applied to three-coordinate measuring machine
CN113834446A (en) * 2021-11-25 2021-12-24 南京万生华态科技有限公司 Acquisition device and acquisition method for fringe projection image
CN113834446B (en) * 2021-11-25 2022-02-15 南京万生华态科技有限公司 Acquisition device and acquisition method for fringe projection image
CN114234848A (en) * 2021-12-15 2022-03-25 临沂星源电子衡器有限公司 Three-dimensional optical measurement is with projection arrangement who is convenient for adjust object position
CN115508280A (en) * 2022-10-09 2022-12-23 江苏宏芯亿泰智能装备有限公司 Laser measuring and positioning device

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Granted publication date: 20120704