JP2003329424A - Three-dimensional shape measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily perform the focusing and slit space adjustment by the optical path difference, and to easily adjust the focus and the position when performing the three-dimensional shape measurement by utilizing a rear-view mirror. <P>SOLUTION: The three-dimensional shape measuring instrument comprises an image accumulation device 16 to accumulate image signals 202 obtained by picking up images, an operation unit 17 to perform conversion from an image pickup coordinate system of a measurement point on an object 1 for measurement which is measured by an image pickup device 11 to an absolute coordinate system on the object 1 for measurement, a mirror 13 which is installed so as to be present in a visual field area of the image pickup device 11, and has a mirror surface characteristic or the reflection characteristic equivalent thereto in a wavelength area which is observed by the image pickup device 11, and further comprises an operation switching means 18 which uses a coordinates conversion calculation formula depending on the installation position of the mirror 13 for a part of the object 1 to be measured via the mirror 13, and uses a coordinates conversion calculation formula of direct measurement for a direct measurement part of the object 1 to be directly measured. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a case where a measurement light is directly imaged without using a mirror and a measurement light reflected by a mirror is imaged with respect to an object to be measured in recognition of a three-dimensional shape. The present invention relates to a three-dimensional shape measuring device that eliminates the adverse effects of optical path length differences.

[0002]

2. Description of the Related Art When recognizing a three-dimensional object, it is necessary to recognize and grasp the three-dimensional object from, for example, front, rear, left and right directions. For this reason, when registering a three-dimensional object or performing shape modeling, a drive device that rotates the three-dimensional object itself or moves the three-dimensional measuring device around the three-dimensional object is used to make multiple objects from the same three-dimensional object. It is necessary to acquire the measurement data of the viewpoint and synthesize it.

Conventionally, in order to reduce the labor required to move such a driving device, the three-dimensional object and the three-dimensional measuring device are not moved, and a portion which cannot be seen from the front is measured by using a rear-view mirror to obtain measurement data from a virtual viewpoint. There is a method of acquiring a wider range of data and recognizing a three-dimensional object by acquiring the data. Such a method is described, for example, in Reference 1 (“Three-dimensional object data input system using rear-view mirror”, IEICE Transactions D VoL. J70-D No. 5 pp. 995-1002, 198).
7).

FIG. 8 shows a measuring device using the rear-view mirror shown in this document 1. In this device, the CPU
61 is a scanning motor 56 via the D / A converter 62.
Scan mirror 5 fixed to this motor shaft
Scan 5. Measurement beam 59 emitted from the LD light source 54
After being passed through the scanning mirror 55 and the back mirrors 57 and 58, or directly from the scanning mirror 55, the object 63 to be measured is irradiated and scanned. The image at this time is the CCD camera 5
2 image, and once stored in the video RAM 60, CP
U61 calculates the distance information. Turntable 5
1 is used as necessary to change the direction of the object to be measured and change the measurement portion.

[0005]

When the measurement operation is performed using the above-described apparatus shown in FIG. 8, the measurement target object 63 is directly or indirectly measured via the rear-view mirrors 57 and 58. In this case, the optical path length is inevitably in the portion measured through the reflection mirrors 57 and 58 (referred to as reflection measurement portion) and the portion directly measured without the back mirrors 57 and 58 (referred to as direct measurement portion). Makes a difference.

However, for the observation of the measurement light up to now, only the observation system including the imaging lens 53 and the CCD camera 52 is used, and the reflection measurement portion and the direct reflection measurement portion are directly caused by the defocus due to the difference in the optical path length. Both measurement parts cannot be measured with high accuracy. Although it is conceivable to use a lens with a deep depth of focus so that both the reflection measurement portion and the direct measurement portion are in focus, in this case, there is a problem that the measurement accuracy deteriorates. That is, in any case, the measurement accuracy is not good due to the difference in optical path length.

On the other hand, as a three-dimensional shape measuring method, many methods of irradiating a measuring object with slit-shaped measuring light, capturing an image of the measuring object at this time, and performing signal processing have been proposed. For example, in Japanese Patent Laid-Open No. 60-152903, slit-shaped measurement light (slit light) is emitted from a projector, the emitted measurement light is imaged by a television camera, and the image obtained by the image analysis is analyzed to obtain the tertiary image. A technique for extracting original shape information is disclosed. Focusing by this method is performed by using a lens system on both the projector side and the TV camera side by focusing on the object to be measured.

In the three-dimensional shape measuring instrument using such slit light, when the rear-view mirror is used to measure the three-dimensional shape as shown in the above-mentioned document 1, the rear-view mirror is used. The difference in optical path length described above occurs, the problem that the measurement light with the focus on the measurement target object is not emitted, and the irradiation of the slit light that is the measurement light (slit) interval is not fixed has been solved. Absent.

As described above, in the three-dimensional shape measuring apparatus using the slit mirror and the rear surface mirror, due to the difference in the measuring optical path, the focusing is insufficient and the image is blurred, so that the unmeasurable portion becomes large, or There is a problem that the measurement accuracy is deteriorated due to insufficient focusing and that the measurement (slit) interval becomes non-uniform due to the difference in equivalent distance to the measurement target object based on the difference in the measurement optical path.

Further, in the above-mentioned Document 1, coordinate transformation for converting the image pickup system coordinates of the measurement points on the measurement target object to the absolute coordinate system on the measurement target object is performed by a batch matrix calculation formula. For this reason, when a plurality of focus adjustment stages of the image pickup system and position adjustment stages of the rear surface mirror are provided for switching, the parameters of the above-described matrix calculation formula are identified for each combination of these focus and position adjustments. Calibration)
However, there is a problem that a very complicated procedure is required.

The present invention has been made in view of the above,
The objective of the present invention is to provide a three-dimensional shape measuring device that facilitates focusing and slit spacing adjustment based on the difference in optical path length when performing three-dimensional shape measurement using a rearview mirror, and that facilitates focus adjustment and position adjustment. .

[0012]

In order to achieve the above object, a three-dimensional shape measuring apparatus according to the present invention comprises a measuring light irradiating means for irradiating an object to be measured with a measuring light, and a measuring light irradiating means for irradiating the measuring light. An image pickup means for picking up an image of a measurement target object illuminated by, an image storage means for storing a signal obtained by the image pickup, and a measurement point on the measurement target object for measuring the stored image information in the image pickup means. Arithmetic processing means for performing conversion processing from the image pickup system coordinates to an absolute coordinate system on the object to be measured, and a mirror surface in a wavelength range observable by the image pickup means installed so as to exist in the visual field area of the image pickup means. Or, in a three-dimensional shape measuring apparatus having a measurement optical path changing means having a reflection characteristic according to the above, in the portion of the measurement target object measured through the measurement optical path changing means, A coordinate conversion calculation formula that depends on the installation position of the photometric path changing unit is used, and for the direct measurement portion of the measurement target object that is directly measured, arithmetic processing switching unit that uses the coordinate conversion calculation formula of direct measurement is provided. And

According to the present invention, the coordinate conversion type arithmetic processing is switched and used in the portion measured through the measuring optical path changing means and the direct measurement portion directly measured. It is possible to perform accurate measurements separately, and even when both measurement parts are included in one measurement, it is possible to perform simultaneous measurement.

In the three-dimensional shape measuring apparatus according to the next invention, in the above invention, the direct measurement portion of the measurement target object directly measured by the image pickup means and the portion of the measurement target object measured through the measurement optical path changing means. A focal length correcting unit that corrects a difference in optical path length between, and a measurement data combining unit that combines a plurality of measurement results measured with different focal length settings,
It is characterized by having.

According to the present invention, the focal length correcting means for correcting the difference in optical path length caused by the measuring optical path changing means and the measuring data synthesizing means for synthesizing a plurality of measurement results measured at different focal length settings are provided. With this, it is possible to perform measurement with substantially uniform accuracy in the direct measurement portion of the measurement target object that is directly measured by the imaging unit and the portion of the measurement target object that is measured through the measurement optical path changing unit.

In the three-dimensional shape measuring apparatus according to the next invention, in the above invention, the measuring light is radiated by the measuring light irradiating means and the measuring light is directly radiated by the measuring light irradiating means. An irradiation focal length correction unit that corrects a difference in optical path length from a portion of the measurement target object that is irradiated, and a measurement data combining unit that combines a plurality of measurement results irradiated with different irradiation focal length settings are provided. Is characterized by.

According to the present invention, by providing the irradiation focal length correcting means for correcting the difference in optical path length caused by the measuring light path changing means, the measuring light irradiating means directly irradiates the measuring object with the measuring light directly. It is possible to irradiate the measurement light substantially uniformly in the measurement portion and the portion of the measurement target object to which the measurement light is radiated via the measurement optical path changing means, and to obtain uniform measurement accuracy.

The three-dimensional shape measuring apparatus according to the next invention is, in the above-mentioned invention, a direct measurement portion of the measurement target object directly measured by the image pickup means and a portion of the measurement target object measured through the measurement optical path changing means. Is provided with an irradiation pitch correction means for correcting the difference in optical path length between the two and measurement data combining means for combining a plurality of measurement results irradiated with different irradiation pitch settings.

According to the present invention, there is provided irradiation pitch correction means for correcting the irradiation pitch of the measurement light so as to correct the difference in the measurement pitch on the surface of the object to be measured due to the difference in the optical path length caused by the measurement optical path changing means. By having
It is possible to perform measurement with substantially uniform accuracy in the direct measurement portion of the measurement target object directly irradiated with the measurement light and the portion of the measurement target object irradiated with the measurement light via the measurement optical path changing means.

In the three-dimensional shape measuring apparatus according to the next invention, in the above invention, the arithmetic processing means includes a measuring position directly observing the calibration object whose shape and dimension information are known, and the measuring optical path changing means. It is characterized in that arithmetic processing for specifying the installation position of the measurement optical path changing means is performed based on the measurement result observed.

According to the present invention, since the arithmetic processing for specifying the installation position of the measuring optical path changing means is performed, only this calculation formula needs to be changed when the position of the measuring optical path changing means is changed. Therefore, it is not necessary to prepare the calculation processing for all the combination settings with other adjustment factors such as the focal length setting, and the installation adjustment procedure can be simplified.

A three-dimensional shape measuring apparatus according to the next invention is characterized in that, in the above-mentioned invention, the measurement light path changing means has a variable reflection characteristic, and a reflection characteristic control means for switching between diffuse reflection and specular reflection is provided. .

According to the present invention, by providing the reflection characteristic control means for switching the reflection characteristic of the measuring optical path changing means to the diffuse reflection or the specular reflection, it becomes possible to directly measure the distance of the specular reflection surface, and to perform a more accurate calculation. Processing can be performed.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

Embodiment 1. FIG. 1 is a diagram showing the configuration of a three-dimensional shape measuring apparatus that is Embodiment 1 of the present invention. In FIG. 1, measurement light 10 is applied to object 1 to be measured.
1 has a projector 12 that irradiates the measurement target object 1 and an imaging device 11 that captures the irradiation light of the measurement target object 1. In the vicinity of the measurement target object 1, the measurement light 101 from the irradiation lens 15 of the projector 12 is measured. 1 arranged to irradiate the side surface and the back surface of the same and to capture the irradiation light of the side surface and the back surface into the imaging device 11 via the imaging lens 14.
3 is provided.

The measurement control means 20 composed of a personal computer and an I / O board is arranged so as to output the measurement light control signal 206 to the projector 12 and output the imaging control signal 201 to the imaging device 11. .
Further, it is provided with an image storage means 16 to which a video signal 202 is sent from the image pickup device 11, and an arithmetic processing means 17 to which an image signal 203 is sent from the image storage means 16. Further, the arithmetic processing means 17 has an arithmetic processing switching means 18 for transmitting the coordinate conversion arithmetic parameter designation information 204, and the arithmetic processing switching means 18 is supplied with an arithmetic processing switching control signal 205 from the measurement control means 20. The arithmetic processing means 1
The distance measurement information 207, which is the output of No. 7, is given in this first embodiment.
It is the output of the three-dimensional shape measuring device of.

The measurement control means 20 is a personal computer and an I
It is also possible to construct by software by combining the / O boards, or by using a dedicated control board. Further, the projector 12 usually has a configuration in which a halogen lamp and a liquid crystal panel or the like are combined, and may be any one capable of irradiating slit light of an arbitrary pattern, but other irradiating means such as a modulated slit LD light source The slit light pattern irradiation may be performed by combining an optical scanning means such as a galvanometer mirror.

In the configuration shown in FIG. 1, a series of measurement operations are controlled by the measurement control means 20. First, the measurement light control signal 206 is given from the measurement control means 20 to the projector 12, and the measurement light 101 is emitted through the irradiation lens 15. The mirror 13 is installed in the irradiation range of the measurement light 101, the measurement light 101 is reflected by the mirror 13, and then is irradiated onto the measurement target object 1. Measuring light 1
The object to be measured 1 irradiated with 01 is imaged again by the imaging device 11 such as a CCD camera having the imaging lens 14 attached via the mirror 13, and the video signal 202 obtained by the imaging is captured by the image storage means 16. After being processed, the image signal 203 is sent to the arithmetic processing means 17. In this case, the operation of the imaging device 11 is controlled by the imaging control signal 201.

In the above description, the irradiation of the measurement light 101 on the reflection measurement portion via the mirror 13 and the imaging are described, but it goes without saying that the measurement target object 1 is directly measured on the measurement portion without the mirror 13. Irradiation of measurement light is also performed, and it is also possible to directly capture an image at this direct measurement portion. In the case of changing to this direct measurement, the projector 12 is controlled by the measurement light control signal 206 from the measurement control means 20, the image pickup device 11 is controlled by the image pickup control signal 201, and the calculation processing switching control signal 205 is used for calculation. This is handled by controlling the process switching means 18. Further, regarding the corresponding images of the direct measurement portion and the reflection measurement portion that is measured via the mirror 13 in the measurement image, the arithmetic processing means by the coordinate conversion arithmetic parameter designation information 204 from the arithmetic processing switching means 18 Calibration is performed by the processing preset in 17. Therefore, in the arithmetic processing means 17, in the reflection measurement portion and the direct measurement portion which are measured on the measurement target object 1 via the mirror 13,
Control is performed so that coordinate conversion calculation is performed according to the difference in each optical path. At this time, the arithmetic processing switching control signal 205 is transmitted from the measurement control means 20 to the arithmetic processing switching means 18, the coordinate conversion arithmetic parameter designation information 204 is given to the arithmetic processing means 17, and the distance measurement information according to the difference in the optical path. 207 is output.

In this way, in the direct measurement part of the measurement target object 1 directly measured by the measurement light 101 and the reflection measurement part of the measurement target object 1 measured via the mirror 13,
Since appropriate coordinate conversion calculation processing is performed, both parts can be distinguished and accurately measured.

When the corresponding image portions of the direct measurement portion and the reflection measurement portion are in the same image in the measurement image, coordinate conversion calculation processing is performed corresponding to the image portion, and simultaneous measurement is performed. Is possible.

Embodiment 2. Next, a second embodiment of the present invention will be described. In the second embodiment, the measurement data synthesizing means 19 and the focal length adjusting means 21 are newly provided in the configuration of the above-described first embodiment. That is, the focal length adjusting means 21 to which the focal length control signal 209 from the measurement controlling means 20 is sent is provided, and the focal length adjusting signal 210 from this focal length adjusting means 21 is sent to the imaging lens 14. . Further, a measurement data synthesizing unit 19 to which the distance measurement information 207 is sent is provided at the next stage of the arithmetic processing unit 17, and the integrated distance measurement information 208 is output from the measurement data synthesizing unit 19. Figure 2
Other parts have the same structure as in FIG.

In the configuration of FIG. 2, the focal length adjusting means 21 for adjusting the focal length of the imaging lens 14 adjusts the focus when directly imaging the object 1 to be measured and when imaging through the mirror 13. Focus adjustment is performed. At this time, the focal length control signal 209 from the measurement control means 20 is given to the focal length adjustment means 21, and the focal length adjustment signal 210 is supplied.
Thus, the focus of the imaging lens 14 is adjusted, and imaging is performed based on each focus setting. Thus, the imaging device 1
Image signal 20 at each focus setting acquired by
Similar to the first embodiment, 3 is obtained as distance measurement information 207 that has been subjected to coordinate conversion processing by the arithmetic processing means 17, and the measurement data combining means 19 combines a plurality of measurement results measured at different focal length settings. Are integrated and output as integrated distance measurement information 208.

At this time, the arithmetic processing switching means 18 switches the arithmetic processing so that the coordinate conversion arithmetic processing is performed according to each focus setting. In addition, as for the corresponding image for which each focus setting is effective, calibration is performed by the processing preset by the arithmetic processing means 17 by the coordinate conversion arithmetic parameter designation information 204 from the arithmetic processing switching means 18 as in the first embodiment. Is done.

Thus, in the direct measurement part of the measurement target object 1 directly measured and the reflection measurement part of the measurement target object 1 measured via the mirror 13, an appropriate focal length adjustment,
Since the coordinate conversion calculation process is performed, both parts can be measured with high accuracy.

When the corresponding image portions of the direct measurement portion and the reflection measurement portion are in the same image in the measurement image, focus adjustment and coordinate conversion calculation processing are performed corresponding to the image portion. Therefore, simultaneous measurement is possible.

Embodiment 3. Next, a third embodiment of the invention will be described. In the third embodiment, the measurement data synthesizing unit 19 and the irradiation focal length adjusting unit 22 are newly provided in the configuration of the first embodiment described above. That is, the irradiation focal length control signal 2 from the measurement control means 20.
An irradiation focal length adjusting means 22 to which 10 is sent is provided,
An irradiation focal length adjustment signal 211 from the irradiation focal length adjusting means 22 is sent to the irradiation lens 15. Further, the measurement data synthesizing means 19 to which the distance measurement information 207 is sent is provided in the next stage of the arithmetic processing means 17,
Integrated distance measurement information 20 from this measurement data synthesizing means 19
8 is output. Other parts in FIG. 3 have the same configuration as in FIG.

In the structure of FIG. 3, the irradiation focal length adjusting means 22 for adjusting the focal length of the irradiation lens 15 is used.
The focus adjustment when directly irradiating the measurement object 101 with the measurement light 101 and the focus adjustment when irradiating via the mirror 13 are performed. At this time, the irradiation focal length control signal 210 from the measurement control means 20 is given to the irradiation focal length adjustment means 22, and the irradiation lens 1 is irradiated by the irradiation focal length adjustment signal 211.
5 is adjusted, and measurement light irradiation is performed with each focus setting.

In this way, the image information 203 in each irradiation focus setting acquired by the image pickup device 11 is combined with the measurement data as the distance measurement information 207 which is coordinate-converted by the arithmetic processing means 17, as in the first embodiment. The integrated processing is performed by the means 19, and the integrated distance measurement information 208 is output.

At this time, the arithmetic processing switching means 18 switches the arithmetic processing so that the coordinate conversion arithmetic processing according to each irradiation focus setting is performed. In addition, for the corresponding image for which each irradiation focus setting is effective,
As in the first embodiment, the calibration is performed by the processing preset by the arithmetic processing means 17 by the coordinate conversion arithmetic parameter designation information 204 from the arithmetic processing switching means 18.

Thus, in the direct measurement portion of the measurement target object 1 directly measured and the reflection measurement portion of the measurement target object 1 measured via the mirror 13, appropriate irradiation focal length adjustment and coordinate conversion calculation processing are performed. Since it is performed, both parts can be accurately measured.

In the measurement image, when the corresponding image portions of the direct measurement portion and the reflection measurement portion are in the same image, the irradiation focus adjustment and coordinate conversion calculation processing are performed corresponding to the image portion. It is performed and simultaneous measurement becomes possible.

Fourth Embodiment Next, a fourth embodiment of the invention will be described. In the fourth embodiment, the measurement data synthesizing means 19 and the irradiation pitch correcting means 23 are newly provided in the configuration of the above-described first embodiment. That is, the irradiation pitch control signal 212 from the measurement control means 20.
The irradiation pitch correction means 23 for transmitting the irradiation pitch is provided, and the irradiation pitch correction signal 213 from the irradiation pitch correction means 23 is provided.
Are sent to the projector 12. Further, a measurement data synthesizing unit 19 to which the distance measurement information 207 is sent is provided at the next stage of the arithmetic processing unit 17, and the integrated distance measurement information 208 is output from the measurement data synthesizing unit 19. Other parts in FIG. 4 have the same configuration as in FIG.

In the configuration shown in FIG. 4, in the irradiation pitch correction means 23, the object to be measured which is irradiated through the mirror 13 with the irradiation pitch which is the interval between the slit light which is the measurement light 101 emitted from the projector 12. It is adjusted so that the irradiation pitch is substantially the same in both the reflection measurement part 1 and the direct measurement part of the measurement target object 1 that is directly irradiated. At this time, the irradiation pitch control signal 212 from the measurement control unit 20 is given to the irradiation pitch correction unit 23, and the irradiation pitch of the measurement light 101 from the projector 12 is corrected by the irradiation pitch correction signal 213.

Since the irradiation pitch of the measuring light 101 normally increases in proportion to the distance to the object 1 to be measured, for example, the average distance to the measurement portion is directly reflected by D1, and the reflection is measured by the mirror 13. If the average distance to the measurement part is D2, the irradiation angle pitch in the direct measurement part is P1, mirror 1
Let P2 be the irradiation angle pitch in the reflection measurement part that is reflected by 3 and measured, and it can be obtained in a proportional relationship such as P1: P2 = D1: D2. Further, it is also possible to make a finer and continuous change according to the average distance of each part based on the result of measurement once. In this way, the image information 203 obtained by irradiating the measurement light at each irradiation pitch acquired by the image pickup device 11 has the arithmetic processing unit 1 as in the first embodiment.
The distance measurement information 207 subjected to the coordinate conversion processing in 7 is integrated in the measurement data synthesizing means 19 and output as integrated distance measurement information 208.

At this time, the arithmetic processing switching means 18 switches the arithmetic processing so that the coordinate conversion arithmetic processing is performed according to each irradiation pitch. Further, for the corresponding image in which each irradiation pitch is effective, the arithmetic processing means 17 is designated by the coordinate conversion arithmetic parameter designation information 204 from the arithmetic processing switching means 18 as in the first embodiment.
Calibration is performed by the process set in advance.

Thus, in the direct measurement portion of the measurement target object 1 directly measured and the reflection measurement portion of the measurement target object 1 measured via the mirror 13, appropriate irradiation pitch adjustment and coordinate conversion calculation processing are performed. Therefore, both parts can be measured with uniform accuracy.

In the measurement image, when the corresponding image portions of the direct measurement portion and the reflection measurement portion are in the same image, the irradiation pitch adjustment and coordinate conversion calculation processing are performed corresponding to the image portion. It is performed and simultaneous measurement becomes possible.

Embodiment 5. Next, a fifth embodiment of the invention will be described. In the fifth embodiment, the calibration object is arranged as the measurement target object in the configuration of the first embodiment described above. Other parts in FIG. 5 have the same configuration as in FIG.

In the configuration of FIG. 5, the calibration object 2 whose shape and size information is known is composed of, for example, a cube whose size is known, and although not shown in FIG. An object on which a pattern is drawn is suitable. With respect to this calibration object 2, first, the front plane portion 3 is measured by direct measurement.

Next, as shown in FIG. 6, the side plane portion 7 or the back plane portion 8 of the mirror image 6 of the calibration object 2 is measured via the mirror 13, and it is assumed that the mirror 13 does not exist. Get the M8.

Here, M7 and M8 are 3 × N vectors in which the three-dimensional X, Y, and Z coordinates of each N measurement points on the side surface plane portion 7 and the back surface plane portion 8 are arranged. By the way, since the shape and size of the calibration object 2 are known, it is possible to estimate the existing positions of the side surface flat surface portion 4 and the rear surface flat surface portion 5 based on the measurement values of the front surface flat portion 3 measured previously. Yes,
Let M4 and M5 (3x N vector) respectively. At this time, with M4
Corresponding points of M7, M5 and M8, M41 and M71, M42 and M72, M51 and M81
The surface that divides the line segment connecting the lines into two is a specular reflection surface 24, and the specular reflection surface 24 of the mirror 13 can be specified. It should be noted that when the measurement points are associated with each other, the lattice pattern described above is used as a reference to facilitate the association.

In the above description, a cube is taken as an example of the calibration object 2, but the shape and size are known,
The object may be an arbitrary curved surface as long as the measurement points can be associated with each other.

As described above, since the specular reflection surface 24 can be specified in advance with respect to the installation position of the mirror 13,
The coordinate conversion calculation formulas in the calculation processing means 17 and the calculation processing switching means 18 can be switched independently of the focus adjustment and the irradiation pitch adjustment. For this reason, it is not necessary to prepare coordinate calculation expressions for all combinations and settings with other adjustment factors such as focal length settings, and the installation adjustment procedure can be simplified.

Sixth Embodiment Next, a sixth embodiment of the invention will be described. In the sixth embodiment, the reflection characteristic control unit 2 is provided in the configuration of the first embodiment described above.
5 is newly provided. That is, the reflection characteristic control means 25 to which the reflection characteristic control signal 214 from the measurement control means 20 is sent.
Is provided, and the reflection characteristic adjustment signal 215 from the reflection characteristic control means 25 is sent to the mirror 13. Other parts in FIG. 7 have the same configuration as in FIG.

In the structure shown in FIG. 7, the reflection characteristic control means 25 is provided with a mechanism for controlling the surface reflection characteristic of the mirror 13 to be diffuse reflection or specular reflection. At this time,
The reflection characteristic control signal 214 from the measurement control unit 20 becomes the reflection characteristic adjustment signal 215 by the reflection characteristic control unit 25, and controls the surface reflection characteristic of the mirror 13.

As the structure of the reflection characteristic control means 25, for example, when the mirror 13 is composed of a metal vapor deposition surface and glass and the glass surface is very thin and can be ignored for the measurement accuracy, This can be achieved by simply arranging a thin movable sheet having diffuse reflection characteristics. Further, when the mirror 13 is formed of a specular reflection metal surface, the metal surface itself can be regarded as a reflection surface, which is more convenient.
Furthermore, the reflection characteristics can be made variable by providing a minute gap between the metal vapor deposition surface of the mirror 13 and the protective glass and inserting or withdrawing a sheet-like object having a diffuse reflection characteristic or a liquid. Further, it is also possible to arrange a protective glass plate filled with liquid crystal and make the reflection characteristic variable by voltage control such as transmission and shielding.

As described above, since the mirror 13 itself can be directly measured, the mirror 13 can be controlled so as to have the diffuse reflection characteristic. Therefore, the reflection surface parameter can be directly measured without being affected by the estimation error of other measurement parameters. Determination can be made, and more accurate arithmetic processing can be performed.

[0059]

As described above, according to the present invention, the measuring light irradiation means for irradiating the measuring object with the measuring light and the image of the measuring object irradiated with the measuring light by the measuring light irradiating means are displayed. An image pickup means for picking up an image, an image storage means for storing a signal obtained by the image pickup, and an image pickup system coordinate of a measurement point on the measurement target object measured by the image pickup means with respect to the stored image information on the measurement target object. Arithmetic processing means for performing conversion processing to an absolute coordinate system, and measurement optical path change that is installed so as to exist in the visual field area of the image pickup means and has a mirror surface or a reflection characteristic similar to that in a wavelength range observable by the image pickup means In the three-dimensional shape measuring apparatus having the means, the part of the object to be measured which is measured via the measuring optical path changing means is a seat depending on the installation position of the measuring optical path changing means. With respect to the direct measurement portion of the measurement target object that is directly measured by using the conversion calculation formula, the portion that is measured through the measurement optical path changing means by providing the arithmetic processing switching means that uses the coordinate conversion calculation formula of direct measurement. In the direct measurement part that is directly measured with, the calculation processing of the coordinate conversion formula is switched and used, so it is possible to distinguish between both measurements and perform accurate measurement, and both measurement parts can be performed once. Even if it is included, it is possible to measure at the same time.

According to the next invention, the focus for correcting the difference in optical path length between the direct measurement portion of the measurement target object directly measured by the image pickup means and the portion of the measurement target object measured through the measurement optical path changing means. By providing the distance correction means and the measurement data synthesis means for synthesizing a plurality of measurement results measured at different focal length settings, the direct measurement portion of the measurement target object directly measured by the imaging means and the measurement optical path change It is possible to measure with substantially uniform accuracy in the portion of the measurement target object that is measured via the means.

According to the next invention, the direct measurement portion of the measurement target object directly irradiated with the measurement light by the measurement light irradiation means and the portion of the measurement target object irradiated with the measurement light via the measurement optical path changing means. By providing the irradiation focal length correction means for correcting the difference in the optical path length and the measurement data synthesizing means for synthesizing a plurality of measurement results irradiated with different irradiation focal length settings, the measurement light irradiating means can measure the measurement light. It is possible to irradiate the measurement light substantially uniformly between the direct measurement portion of the measurement target object that is directly irradiated and the portion of the measurement target object that is irradiated with the measurement light via the measurement optical path changing means, and to obtain uniform measurement accuracy. can get.

According to the next invention, the irradiation for correcting the difference in optical path length between the direct measurement portion of the measurement target object directly measured by the image pickup means and the portion of the measurement target object measured through the measurement optical path changing means. By providing the pitch correction means and the measurement data synthesizing means for synthesizing a plurality of measurement results irradiated with different irradiation pitch settings, the measurement light path is directly changed with the measurement portion directly radiated with the measurement light. The measurement can be performed with substantially uniform accuracy in the portion of the measurement target object irradiated with the measurement light via the means.

According to the next invention, the arithmetic processing means is based on the measurement position obtained by directly observing the calibration object whose shape and dimension information are known and the measurement result obtained through the measurement optical path changing means. Since the calculation processing for specifying the installation position of the measurement optical path changing means is performed to perform the calculation processing for specifying the installation position of the measurement optical path changing means, this calculation is performed when the position of the measurement optical path changing means is changed. You only have to change the formula. Therefore, it is not necessary to prepare the calculation processing for all the combination settings with other adjustment factors such as the focal length setting, and the installation adjustment procedure can be simplified.

According to the next invention, the reflection characteristic of the measuring optical path changing means is made variable, and the reflection characteristic control means for switching between the diffuse reflection and the specular reflection is provided, so that the direct distance measurement of the specular reflection surface becomes possible. It is possible to perform highly accurate arithmetic processing.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a three-dimensional shape measuring apparatus that is Embodiment 1 of the present invention.

FIG. 2 is a configuration diagram of a three-dimensional shape measuring apparatus which is Embodiment 2 of the present invention.

FIG. 3 is a configuration diagram of a three-dimensional shape measuring apparatus that is Embodiment 3 of the present invention.

FIG. 4 is a configuration diagram of a three-dimensional shape measuring apparatus which is Embodiment 4 of the present invention.

FIG. 5 is a configuration diagram of a three-dimensional shape measuring apparatus which is Embodiment 5 of the present invention.

FIG. 6 is a diagram illustrating the principle of Embodiment 5 of the present invention.

FIG. 7 is a configuration diagram of a three-dimensional shape measuring apparatus according to a sixth embodiment of the present invention.

FIG. 8 is a configuration diagram of a conventional three-dimensional shape measuring apparatus.

[Explanation of symbols]

1 object to be measured, 2 object for calibration, 11 imaging device,
12 projector, 13 mirror, 14 imaging lens, 15 irradiation lens, 16 image storage means, 17
Arithmetic processing means, 18 arithmetic processing switching means, 19 measurement data synthesizing means, 20 measurement control means, 21 focal length adjusting means, 22 irradiation focal length adjusting means, 23 irradiation pitch correcting means, 25 reflection characteristic control means.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kazuhiko Sumi             2-3 2-3 Marunouchi, Chiyoda-ku, Tokyo             Inside Ryo Electric Co., Ltd. F term (reference) 2F065 AA04 AA53 BB05 EE00 EE05                       FF01 FF02 FF09 FF61 FF65                       GG02 GG08 HH05 JJ03 JJ26                       LL13 LL28 LL30 LL49 LL62                       LL63 MM16 NN00 NN01 QQ00

Claims (6)

[Claims] 1. A measurement light irradiating means for irradiating a measurement target object with the measurement light, an image pickup means for picking up an image of the measurement target object irradiated with the measurement light by the measurement light irradiating means, and a signal obtained by the image pickup. And an image processing means for converting the imaged system coordinates of the measurement points on the measurement target object measured by the imaging means from the imaging system coordinates of the stored image information into the absolute coordinate system on the measurement target object. In the three-dimensional shape measuring device having a measurement optical path changing unit that is installed so as to be present in the visual field region of the image pickup unit and has a mirror surface or a reflection characteristic similar to that in a wavelength range in which the image pickup unit can observe, For the part of the object to be measured which is measured through the measuring optical path changing means, the coordinate conversion calculation formula depending on the installation position of the measuring optical path changing means is used for direct measurement. For the direct measurement portion of the elephant body, three-dimensional shape measuring apparatus characterized by having an arithmetic processing switching means using a coordinate transformation formula for direct measurement. 2. Focal length correction means for correcting the difference in optical path length between the direct measurement portion of the measurement target object directly measured by the image pickup means and the portion of the measurement target object measured through the measurement optical path changing means, The three-dimensional shape measuring apparatus according to claim 1, further comprising: a measurement data synthesizing unit that synthesizes a plurality of measurement results measured at different focal length settings. 3. A difference in optical path length between a direct measurement portion of a measurement target object to which the measurement light is directly irradiated by the measurement light irradiation means and a portion of the measurement target object to which the measurement light is irradiated via the measurement light path changing means. The three-dimensional shape measuring apparatus according to claim 1, further comprising: an irradiation focal length correcting unit that corrects; and a measurement data combining unit that combines a plurality of measurement results irradiated with different irradiation focal length settings. . 4. An irradiation pitch correction means for correcting the difference in optical path length between the direct measurement portion of the measurement target object directly measured by the imaging means and the portion of the measurement target object measured through the measurement optical path changing means, The three-dimensional shape measuring apparatus according to claim 1, further comprising: a measurement data synthesizing unit that synthesizes a plurality of measurement results emitted at different irradiation pitch settings. 5. The calculation processing means determines the measurement optical path changing means based on the measurement position obtained by directly observing the calibration object whose shape and size information is known and the measurement result obtained through the measurement optical path changing means. The three-dimensional shape measuring apparatus according to claim 1, wherein arithmetic processing for specifying an installation position is performed. 6. The three-dimensional shape measuring apparatus according to claim 1, further comprising a reflection characteristic control unit that changes a reflection characteristic of the measurement optical path changing unit and switches diffuse reflection or specular reflection.