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JP2007014441A - Imaging element package for electronic endoscope - Google Patents

Imaging element package for electronic endoscope Download PDF

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Publication number
JP2007014441A
JP2007014441A JP2005197038A JP2005197038A JP2007014441A JP 2007014441 A JP2007014441 A JP 2007014441A JP 2005197038 A JP2005197038 A JP 2005197038A JP 2005197038 A JP2005197038 A JP 2005197038A JP 2007014441 A JP2007014441 A JP 2007014441A
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electronic endoscope
package
optical filter
cover glass
projection
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Inventor
Takayuki Ogino
隆之 荻野
Kazuyuki Yamamoto
和之 山本
Tetsuhiro Ito
哲弘 伊東
Seiichiro Okamura
誠一郎 岡村
Tomokazu Yamashita
友和 山下
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Pentax Corp
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Pentax Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an imaging element package for an electronic endoscope, permitting assembly of projection image quality securing members such as an optical filter and a shading mask in an electronic endoscope in such a way as not to be deteriorated with the steam of high-pressure steam sterilization by an easy process. <P>SOLUTION: The projection image quality securing members such as the optical filter 21 and the shading mask 33 for giving prescribed quality to the image of a subject projected by an objective optical system 3 on the imaging surface of the solid imaging element 11 are disposed inside a portion air-tightly enclosed by a package housing 13 and cover glass 14. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は、電子内視鏡の挿入部先端に内蔵される電子内視鏡用撮像素子パッケージに関する。   The present invention relates to an image pickup device package for an electronic endoscope that is built in the distal end of an insertion portion of the electronic endoscope.

電子内視鏡用撮像素子パッケージは一般に、内視鏡の挿入部先端に内蔵される対物光学系に対して独立したユニットとして構成されており、対物光学系による被写体の投影位置に撮像面が配置される固体撮像素子の周囲が、固体撮像素子を保持する電気絶縁材からなる絶縁基体に取り付けられた金属製のパッケージハウジングで気密に囲まれ、パッケージハウジングの前面に形成された窓部は透明なカバーガラスが気密に取り付けられて、固体撮像素子に水分が浸入しないようになっている(例えば、特許文献1、2)。
特開平9−163243 特開平11−47091
An image pickup device package for an electronic endoscope is generally configured as a unit independent of an objective optical system built in the distal end of an endoscope insertion portion, and an image pickup surface is arranged at a projection position of a subject by the objective optical system. The solid-state image pickup device is hermetically surrounded by a metal package housing attached to an insulating base made of an electrical insulating material that holds the solid-state image pickup device, and the window formed on the front surface of the package housing is transparent. A cover glass is attached in an airtight manner so that moisture does not enter the solid-state imaging device (for example, Patent Documents 1 and 2).
JP-A-9-163243 JP 11-47091 A

固体撮像素子の撮像面に赤外領域の光線やYAGレーザ光線等が入射すると撮像画像に顕著な不具合が生じるので、そのような波長領域の光線は撮像面に達しないように途中で選択的にカットする必要がある。また、撮像面に対する投影光路の周辺部の不要光を遮らないとフレアーやゴーストが発生する原因になるので、そのような不要光を遮るための遮光マスクも必要である。   If a light ray in the infrared region, a YAG laser beam, or the like is incident on the imaging surface of the solid-state imaging device, a noticeable defect occurs in the captured image. Therefore, the light beam in such a wavelength region is selectively selected on the way so as not to reach the imaging surface. It is necessary to cut. Further, if unnecessary light around the projection optical path with respect to the imaging surface is not blocked, flare and ghost are caused. Therefore, a light shielding mask for blocking such unnecessary light is also required.

そこで、従来の電子内視鏡においては、不要な波長の光線をカットするための光学フィルタを対物光学系ユニットと撮像ユニットとの間の位置に組み込んでいた。具体的には、引用文献2に記載された発明のように、光学フィルタ(22)は撮像ユニットのカバーガラスの外面に貼り付けられ、遮光マスク(37)は対物光学系ユニットの後端部分に貼り付けられていた。   Therefore, in the conventional electronic endoscope, an optical filter for cutting light with an unnecessary wavelength is incorporated at a position between the objective optical system unit and the imaging unit. Specifically, as in the invention described in the cited document 2, the optical filter (22) is attached to the outer surface of the cover glass of the imaging unit, and the light shielding mask (37) is attached to the rear end portion of the objective optical system unit. It was pasted.

しかし、内視鏡検査終了後に内視鏡を高圧蒸気滅菌装置内で滅菌して内視鏡内に例えば130°C程度の高圧の蒸気が浸入すると、光学フィルタ表面に形成されているコーティングが劣化して所定の波長の光線をカットできなくなってしまう場合がある。   However, when the endoscope is sterilized in the high-pressure steam sterilizer after the end of the endoscopy and high-pressure steam of, for example, about 130 ° C. enters the endoscope, the coating formed on the optical filter surface deteriorates. In some cases, it becomes impossible to cut a light beam having a predetermined wavelength.

また、遮光マスクを対物光学系ユニットの後端部分に貼り付ける作業は、0.01mm単位の芯出し精度やゴミの付着等に神経を使う対物光学系ユニット組み立て工程で行うと非常に煩雑なものになってしまう。   Also, the task of attaching the light-shielding mask to the rear end portion of the objective optical system unit is very complicated if it is performed in the assembly process of the objective optical system unit that uses nerves for centering accuracy of 0.01 mm units and adhesion of dust. Become.

そこで本発明は、光学フィルタや遮光マスク等のような投影像品質確保部材を、高圧蒸気滅菌の蒸気により劣化しない状態に容易な工程で電子内視鏡に組み付けることができる電子内視鏡用撮像素子パッケージを提供することを目的とする。   Accordingly, the present invention provides an imaging device for an electronic endoscope in which a projection image quality securing member such as an optical filter or a light shielding mask can be assembled to an electronic endoscope in an easy process so as not to be deteriorated by high-pressure steam sterilization steam. An object is to provide an element package.

上記の目的を達成するため、本発明の電子内視鏡用撮像素子パッケージは、対物光学系に対して独立したユニットとして電子内視鏡の挿入部先端に内蔵され、対物光学系による被写体の投影位置に撮像面が配置される固体撮像素子の周囲が、固体撮像素子を保持する電気絶縁材からなる絶縁基体に取り付けられた金属製のパッケージハウジングで気密に囲まれて、パッケージハウジングの前面に形成された窓部は透明なカバーガラスが気密に取り付けられた電子内視鏡用撮像素子パッケージにおいて、対物光学系により固体撮像素子の撮像面に投影される被写体の像に所定の品質を付与するための投影像品質確保部材を、パッケージハウジングとカバーガラスとで気密に囲まれた部分内に配置したものである。   In order to achieve the above object, the electronic endoscope imaging device package of the present invention is built in the distal end of the insertion portion of the electronic endoscope as a unit independent of the objective optical system, and projects an object by the objective optical system. Formed on the front of the package housing, the periphery of the solid-state image sensor where the imaging surface is located is hermetically surrounded by a metal package housing attached to an insulating base made of an electrical insulating material that holds the solid-state image sensor In the imaging device package for an electronic endoscope in which a transparent cover glass is airtightly attached, the window portion is provided with a predetermined quality for an image of a subject projected on the imaging surface of the solid-state imaging device by the objective optical system. The projection image quality securing member is arranged in a portion hermetically surrounded by the package housing and the cover glass.

なお、投影像品質確保部材が、被写体像の投影光路の周辺部の不要光を遮るための遮光マスクと、不要な波長の光線をカットするための光学フィルタのどちらか一方であってもよく、その投影像品質確保部材が、パッケージハウジングで囲まれた空間内においてカバーガラスの裏面に貼り付けられていてもよい。   The projection image quality ensuring member may be either one of a light shielding mask for blocking unnecessary light around the projection optical path of the subject image and an optical filter for cutting light with an unnecessary wavelength, The projection image quality securing member may be attached to the back surface of the cover glass in a space surrounded by the package housing.

また、投影像品質確保部材が、被写体像の投影光路の周辺部の不要光を遮るための遮光マスクと、不要な波長の光線をカットするための光学フィルタであってもよく、その場合、光学フィルタが、パッケージハウジングで囲まれた空間内においてカバーガラスの裏面に貼り付けられ、遮光マスクが光学フィルタの裏面に貼り付けられていてもよい。   In addition, the projection image quality ensuring member may be a light shielding mask for blocking unnecessary light around the projection optical path of the subject image and an optical filter for cutting light with an unnecessary wavelength. The filter may be attached to the back surface of the cover glass in a space surrounded by the package housing, and the light shielding mask may be attached to the back surface of the optical filter.

また、光学フィルタが、その表面に特定波長領域の光線をカットするためのコーティングが施されたものであってもよい。   Further, the optical filter may have a surface coated with a coating for cutting light in a specific wavelength region.

本発明によれば、対物光学系により固体撮像素子の撮像面に投影される被写体の像に所定の品質を付与するための光学フィルタや遮光マスク等のような投影像品質確保部材を、パッケージハウジングとカバーガラスとで気密に囲まれた部分内に配置したことにより、高圧蒸気滅菌の蒸気により劣化しない状態に容易な工程で電子内視鏡に組み付けることができる。   According to the present invention, a projection image quality securing member such as an optical filter or a light shielding mask for imparting a predetermined quality to an image of a subject projected on an imaging surface of a solid-state imaging device by an objective optical system is provided in a package housing. And the cover glass can be assembled to the electronic endoscope in an easy process so as not to deteriorate due to the steam of high-pressure steam sterilization.

対物光学系に対して独立したユニットとして電子内視鏡の挿入部先端に内蔵され、対物光学系による被写体の投影位置に撮像面が配置される固体撮像素子の周囲が、固体撮像素子を保持する電気絶縁材からなる絶縁基体に取り付けられた金属製のパッケージハウジングで気密に囲まれて、パッケージハウジングの前面に形成された窓部は透明なカバーガラスが気密に取り付けられた電子内視鏡用撮像素子パッケージにおいて、対物光学系により固体撮像素子の撮像面に投影される被写体の像に所定の品質を付与するための投影像品質確保部材を、パッケージハウジングとカバーガラスとで気密に囲まれた部分内に配置する。   The solid-state imaging device is held around the solid-state imaging device that is built into the distal end of the insertion part of the electronic endoscope as a unit independent of the objective optical system, and the imaging surface is arranged at the projection position of the subject by the objective optical system. Imaging for an electronic endoscope, which is hermetically surrounded by a metal package housing attached to an insulating base made of an electrical insulating material, and a transparent cover glass is hermetically attached to the window formed on the front surface of the package housing. In the element package, the projection image quality securing member for giving a predetermined quality to the image of the subject projected on the imaging surface of the solid-state imaging element by the objective optical system is hermetically surrounded by the package housing and the cover glass Place in.

図面を参照して本発明の実施例を説明する。
図2は電子内視鏡の挿入部1の先端部分を示しており、可撓性の挿入部1の先端面には観察窓2が配置されていて、その内側には、対物光学系3が対物光学系ユニット枠4内に収納された状態に配置されている。
Embodiments of the present invention will be described with reference to the drawings.
FIG. 2 shows the distal end portion of the insertion portion 1 of the electronic endoscope. An observation window 2 is disposed on the distal end surface of the flexible insertion portion 1, and an objective optical system 3 is disposed on the inner side. It is arranged in a state of being housed in the objective optical system unit frame 4.

対物光学系3の後方には対物光学系3とは独立したユニットである撮像素子パッケージ10が配置されており、その内部に収納されている固体撮像素子11の撮像面11aが、対物光学系3による被写体の投影面に位置するように撮像素子パッケージ10が配置されている。   An imaging element package 10, which is a unit independent of the objective optical system 3, is disposed behind the objective optical system 3, and the imaging surface 11 a of the solid-state imaging element 11 housed therein is an objective optical system 3. The image sensor package 10 is arranged so as to be positioned on the projection plane of the subject.

固体撮像素子11は絶縁基体12に保持されてパッケージハウジング13とカバーガラス14で気密に封止された空間内に配置されており、絶縁基体12から後方に延出する複数の接続端子15に、挿入部1内に挿通配置された信号ケーブル5の信号線5aが接続されている。   The solid-state imaging device 11 is disposed in a space that is held by the insulating base 12 and is hermetically sealed by the package housing 13 and the cover glass 14, and is connected to a plurality of connection terminals 15 that extend rearward from the insulating base 12. A signal line 5a of a signal cable 5 inserted and disposed in the insertion portion 1 is connected.

図1は撮像素子パッケージ10を拡大して示す側面断面図であり、12は、例えばセラミック等のような電気絶縁材からなるブロック状の絶縁基体であり、その前面側に固体撮像素子11が接合固着されて保持されている。   FIG. 1 is an enlarged side sectional view showing an image pickup device package 10. Reference numeral 12 denotes a block-like insulating base made of an electric insulating material such as ceramic, and a solid-state image pickup device 11 is bonded to the front side thereof. It is fixed and held.

16は、固体撮像素子11の内部回路と接続されているボンディングワイヤであり、絶縁基体12内に前後方向に埋設された導電体(図示せず)を介して接続端子15と電気的に接続されている。   Reference numeral 16 denotes a bonding wire connected to the internal circuit of the solid-state imaging device 11, which is electrically connected to the connection terminal 15 via a conductor (not shown) embedded in the front-rear direction in the insulating base 12. ing.

絶縁基体12の後半部分は前半部分に比べて外周が一段細く形成されており、その部分には金属製の環状部材17がピッタリと配置されて、無機質の接着剤で絶縁基体12側と気密に接合されている(接合部A)。   The second half of the insulating base 12 is formed with a thin outer periphery compared to the first half, and a metal annular member 17 is perfectly disposed in the part, and the insulating base 12 is hermetically sealed with an inorganic adhesive. It is joined (joining part A).

13は、高温高圧蒸気滅菌に際しても固体撮像素子11に蒸気等が浸入しないように固体撮像素子11の周囲を気密に囲む状態に設けられた金属製のパッケージハウジングであり、その後半部分は絶縁基体12の周囲を囲む状態に配置されて、後端部が環状部材17の後端外縁部に気密に溶接されている(溶接部B)。   Reference numeral 13 denotes a metal package housing provided in a state of airtightly surrounding the solid-state image pickup device 11 so that vapor or the like does not enter the solid-state image pickup device 11 even during high-temperature high-pressure steam sterilization. It arrange | positions in the state surrounding 12 circumference | surroundings, and the rear-end part is welded airtightly to the rear-end outer edge part of the annular member 17 (weld part B).

透明な光学ガラスで円形状に形成された平板状のカバーガラス14は、無機質の接着剤によりパッケージハウジング13の前端の中央位置に形成された窓部に気密に接合されている。そして、分解斜視図である図3にも示されるように、例えば赤外領域付近の波長の光線とYAGレーザ光線等のような特定の波長をカットするためのコーティングが施された光学フィルタ21が、カバーガラス14の裏面に貼り付けられている。ただし、光学フィルタ21がそれ以外の特性のものであってもよい。なお、光学フィルタ21はカバーガラス14より一回り小さな円形の平板状に形成されている。   The flat cover glass 14 formed in a circular shape with transparent optical glass is airtightly joined to a window portion formed at the center position of the front end of the package housing 13 with an inorganic adhesive. As shown in FIG. 3 which is an exploded perspective view, an optical filter 21 having a coating for cutting a specific wavelength such as a light beam having a wavelength near the infrared region and a YAG laser beam is provided. Attached to the back surface of the cover glass 14. However, the optical filter 21 may have other characteristics. The optical filter 21 is formed in a circular flat plate shape that is slightly smaller than the cover glass 14.

そして、さらに光学フィルタ21の裏面には、対物光学系3により固体撮像素子11の撮像面11aに投影される被写体像の投影光路の周辺部の不要光を遮るための遮光マスク22が貼り付けられている。この実施例の遮光マスク22は、薄肉厚(例えば0.05mm程度)の金属板製であるが、それ以外の構成であってもよい。   Further, on the back surface of the optical filter 21, a light shielding mask 22 for blocking unnecessary light around the projection optical path of the subject image projected onto the imaging surface 11 a of the solid-state imaging device 11 by the objective optical system 3 is attached. ing. The light shielding mask 22 of this embodiment is made of a thin metal plate (for example, about 0.05 mm), but may have other configurations.

このような光学フィルタ21と遮光マスク22は、カバーガラス14がパッケージハウジング13に接合される前の、カバーガラス14が単体の状態の時にカバーガラス14に対して接合されるので、組み付け工程が非常に簡素で容易なものになる。なお、カバーガラス14、光学フィルタ21、遮光マスク22は、図4に示されるように外縁が各々矩形状に形成されたものであってもよい。   Since the optical filter 21 and the light shielding mask 22 are bonded to the cover glass 14 when the cover glass 14 is in a single state before the cover glass 14 is bonded to the package housing 13, an assembling process is very difficult. It will be simple and easy. In addition, the cover glass 14, the optical filter 21, and the light shielding mask 22 may each have an outer edge formed in a rectangular shape as shown in FIG.

そして、撮像素子パッケージ10の完成後は、図1に示されるように、光学フィルタ21と遮光マスク22が固体撮像素子11と共に絶縁基体12とパッケージハウジング13とカバーガラス14とで囲まれた気密空間内に配置された状態になるので、高圧蒸気滅菌が行われても光学フィルタ21に蒸気が触れないので、コーティングの劣化等による機能低下が発生しない。   After the image pickup device package 10 is completed, as shown in FIG. 1, an airtight space in which the optical filter 21 and the light shielding mask 22 are surrounded by the solid base image pickup device 11, the insulating base 12, the package housing 13, and the cover glass 14. Therefore, even if high-pressure steam sterilization is performed, the steam does not touch the optical filter 21, so that a functional deterioration due to coating deterioration or the like does not occur.

なお、本発明は上記実施例に限定されるものではなく、例えば図5に示されるように光学フィルタ21のみをカバーガラス14の裏面に貼り付けて配置し、或いは、図6に示されるように遮光マスク22のみをカバーガラス14の裏面に貼り付けて配置したものであっても、各々に個別の効果を生じる。   In addition, this invention is not limited to the said Example, For example, as shown in FIG. 5, only the optical filter 21 is stuck and arrange | positioned on the back surface of the cover glass 14, or as shown in FIG. Even if only the light-shielding mask 22 is disposed on the back surface of the cover glass 14, individual effects are produced for each.

本発明の第1の実施例の電子内視鏡用撮像素子パッケージの側面断面図である。It is side surface sectional drawing of the image pick-up element package for electronic endoscopes of the 1st Example of this invention. 本発明の実施例の電子内視鏡の挿入部の先端部分の側面略示断面図である。It is side surface schematic sectional drawing of the front-end | tip part of the insertion part of the electronic endoscope of the Example of this invention. 本発明の第1の実施例の電子内視鏡用撮像素子パッケージの部分分解斜視図である。1 is a partially exploded perspective view of an image pickup device package for an electronic endoscope according to a first embodiment of the present invention. 本発明の第1の実施例の電子内視鏡用撮像素子パッケージの変形例の部分分解斜視図である。It is a partial exploded perspective view of the modification of the image pick-up element package for electronic endoscopes of the 1st Example of this invention. 本発明の第2の実施例の電子内視鏡用撮像素子パッケージの側面断面図である。It is side surface sectional drawing of the image pick-up element package for electronic endoscopes of the 2nd Example of this invention. 本発明の第3の実施例の電子内視鏡用撮像素子パッケージの側面断面図である。It is side surface sectional drawing of the image pick-up element package for electronic endoscopes of the 3rd Example of this invention.

符号の説明Explanation of symbols

1 挿入部
2 撮像面
3 対物光学系
4 対物光学系ユニット枠
10 撮像素子パッケージ
11 固体撮像素子
11a 撮像面
12 絶縁基体
13 パッケージハウジング
14 カバーガラス
21 光学フィルタ(投影像品質確保部材)
22 遮光マスク(投影像品質確保部材)
DESCRIPTION OF SYMBOLS 1 Insertion part 2 Imaging surface 3 Objective optical system 4 Objective optical system unit frame 10 Imaging device package 11 Solid-state imaging device 11a Imaging surface 12 Insulation base | substrate 13 Package housing 14 Cover glass 21 Optical filter (projection image quality ensuring member)
22 Shading mask (projected image quality assurance member)

Claims (6)

対物光学系に対して独立したユニットとして電子内視鏡の挿入部先端に内蔵され、上記対物光学系による被写体の投影位置に撮像面が配置される固体撮像素子の周囲が、上記固体撮像素子を保持する電気絶縁材からなる絶縁基体に取り付けられた金属製のパッケージハウジングで気密に囲まれて、上記パッケージハウジングの前面に形成された窓部は透明なカバーガラスが気密に取り付けられた電子内視鏡用撮像素子パッケージにおいて、
上記対物光学系により上記固体撮像素子の撮像面に投影される被写体の像に所定の品質を付与するための投影像品質確保部材を、上記パッケージハウジングとカバーガラスとで気密に囲まれた部分内に配置したことを特徴とする電子内視鏡用撮像素子パッケージ。
The solid-state imaging device is built around the distal end of the insertion portion of the electronic endoscope as a unit independent of the objective optical system, and the periphery of the solid-state imaging device in which the imaging surface is arranged at the projection position of the subject by the objective optical system. An electronic endoscope in which a transparent cover glass is hermetically attached to a window formed on the front surface of the package housing, which is hermetically surrounded by a metal package housing attached to an insulating base made of an electrically insulating material to be held. In the mirror image sensor package,
A projection image quality securing member for giving a predetermined quality to an image of a subject projected on the imaging surface of the solid-state imaging device by the objective optical system is in a portion enclosed in an airtight manner by the package housing and the cover glass. An image pickup device package for an electronic endoscope, characterized by being arranged in the above.
上記投影像品質確保部材が、上記被写体像の投影光路の周辺部の不要光を遮るための遮光マスクと、不要な波長の光線をカットするための光学フィルタのどちらか一方である請求項1記載の電子内視鏡用撮像素子パッケージ。   2. The projection image quality ensuring member is either one of a light shielding mask for blocking unnecessary light around a projection optical path of the subject image, and an optical filter for cutting light having an unnecessary wavelength. Imaging device package for electronic endoscope. 上記投影像品質確保部材が、上記パッケージハウジングで囲まれた空間内において上記カバーガラスの裏面に貼り付けられている請求項2記載の電子内視鏡用撮像素子パッケージ。   The image pickup device package for an electronic endoscope according to claim 2, wherein the projection image quality ensuring member is attached to the back surface of the cover glass in a space surrounded by the package housing. 上記投影像品質確保部材が、上記被写体像の投影光路の周辺部の不要光を遮るための遮光マスクと、不要な波長の光線をカットするための光学フィルタである請求項1記載の電子内視鏡用撮像素子パッケージ。   2. The electronic endoscope according to claim 1, wherein the projection image quality ensuring member is a light shielding mask for blocking unnecessary light around a projection optical path of the subject image, and an optical filter for cutting light having an unnecessary wavelength. Mirror image sensor package. 上記光学フィルタが、上記パッケージハウジングで囲まれた空間内において上記カバーガラスの裏面に貼り付けられ、上記遮光マスクが上記光学フィルタの裏面に貼り付けられている請求項4記載の電子内視鏡用撮像素子パッケージ。   5. The electronic endoscope according to claim 4, wherein the optical filter is attached to a back surface of the cover glass in a space surrounded by the package housing, and the light shielding mask is attached to the back surface of the optical filter. Image sensor package. 上記光学フィルタが、その表面に特定波長領域の光線をカットするためのコーティングが施されたものである請求項2ないし5のいずれかの項に記載の電子内視鏡用撮像素子パッケージ。   The image pickup device package for an electronic endoscope according to any one of claims 2 to 5, wherein the optical filter has a surface coated with a coating for cutting light in a specific wavelength region.
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US8152316B2 (en) 2009-08-31 2012-04-10 Olympus Medical Systems Corp. Imaging device

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JPS61220460A (en) * 1985-03-27 1986-09-30 Matsushita Electric Ind Co Ltd Semiconductor device
JPS63146012A (en) * 1986-12-09 1988-06-18 Toshiba Corp Endoscope
JPS63211670A (en) * 1987-02-26 1988-09-02 Nec Corp Solid-state image sensing device
JP2002373977A (en) * 2001-06-14 2002-12-26 Canon Inc Solid state imaging device

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Publication number Priority date Publication date Assignee Title
JPS61220460A (en) * 1985-03-27 1986-09-30 Matsushita Electric Ind Co Ltd Semiconductor device
JPS63146012A (en) * 1986-12-09 1988-06-18 Toshiba Corp Endoscope
JPS63211670A (en) * 1987-02-26 1988-09-02 Nec Corp Solid-state image sensing device
JP2002373977A (en) * 2001-06-14 2002-12-26 Canon Inc Solid state imaging device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8152316B2 (en) 2009-08-31 2012-04-10 Olympus Medical Systems Corp. Imaging device

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