JPH0518746A - Three-dimensional shape measuring device - Google Patents

Abstract

PURPOSE:To provide a three-dimensional shape measuring device simple in the device and its software as well as positive in the visibility of the same point so as to be excellent in profitability, speediness and reliability. CONSTITUTION:There are provided a movable support plate 6 supported in the forward/backward tiltable state on the center part of a horizontal rotary disk 3 through horizontal shafts 5, and a cross laser marker 12 formed of a pair of slit light emitting sources 8, 9 disposed orthogonally on the top face center part of the support plate 6, a half mirror 10 disposed at the intersection of the extended lines of the respective slit light emitting sources 8, 9, and a slit light focus 11 disposed in front of the half mirror 10. On the top face of the support plate 6, there are further provided camera horizontal rotary disks 16 disposed at equal distance on both sides of the cross laser marker 12, a pair of CCD cameras 17 placed on the respective camera horizontal rotary disks 16 in such a way that the respective optical axes 18 are on the same plane as the optical axis 19 of the cross laser marker 12, and the like to measure a measured object 14 by a triangulation system.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional shape measuring device.

[0002]

2. Description of the Related Art Conventionally, as a three-dimensional shape measuring apparatus, for example, as shown in a perspective view of FIG. It is known that the stereoscopic image is 03, 04. In addition, a targetless device that also uses two stereo camera mechanisms is also known, and a device that makes the changes in the surface of the object to be measured meaningful and follows each stereo camera mechanism is also known. And recently, irradiating the measured object with laser slit light,
There is also known an apparatus for measuring the length by stereoscopically viewing with two stereo camera mechanisms aiming at it.

However, these devices have the following drawbacks. (1) In the apparatus shown in FIG. 5, it is necessary to install the target 02, there is a measurement error based on the installation state of the target 02, and the target 02 may not be installed. (2) In the targetless device, it is necessary to guarantee that the two stereo camera mechanisms see the same point, but if the surface of the measured object does not change, it cannot be recognized. (3) An apparatus that makes a change in the surface of an object to be measured have an enormous amount of software and processing time is uneconomical. (4) In the device that irradiates the laser slit light, each stereo camera mechanism tracks the laser slit light with the horizontal swing axis and the vertical swing axis, so the device is complicated and time is required for tracking the light. Takes.

[0004]

SUMMARY OF THE INVENTION The present invention has been proposed in view of the above circumstances, and the apparatus and its software are simple, and the same point can be visually recognized, and therefore economical and quick. Another object of the present invention is to provide a three-dimensional shape measuring device having excellent reliability.

[0005]

To this end, the present invention is directed to a movable support plate supported by a central portion of a horizontal rotary plate so as to be tiltable forward and backward through a horizontal shaft, and orthogonal to the central portion of the top surface of the support plate. A cross laser marker composed of a pair of slit light emitting sources arranged, a half mirror arranged at an intersection of extension lines of the slit light emitting sources, and a slit light focus arranged in front of the half mirror, Horizontal rotary discs for the cameras, which are arranged equidistantly on both sides of the cross laser marker on the top surface of the support disc, and each optical axis is mounted on each of the horizontal rotary discs for the cameras, and each optical axis is the cross laser marker. Is equipped with a pair of CCD cameras on the same plane as the optical axis of and the camera zoom focus mechanism attached to the front end of each CCD camera, and the object to be measured is measured by a triangulation method. That.

[0006]

According to this structure, the following actions are performed. (1) Since the movable support plate supported in the center of the horizontal turntable so as to be tiltable forward and backward via the horizontal axis, any point of the three-dimensional object can be measured. (2) A pair of slit light emitting sources orthogonally arranged in the central portion of the top surface of the support board, half mirrors arranged at intersections of extension lines of the slit light emitting sources, and front of the half mirrors. A cross-shaped laser marker composed of a slit optical focus arranged on the top surface of the support plate, a horizontal rotary plate for the camera arranged equidistantly on both sides of the cross-shaped laser marker on the top surface of the support plate, and a horizontal plate for each camera. Provided are a pair of CCD cameras mounted on a rotating disk, each optical axis of which is on the same plane as the optical axis of the cross laser marker, and a camera zoom focus mechanism attached to the front end of each CCD camera. Therefore, the device and control are simplified.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. First, in the perspective view of FIG. 1, 1 is a device mount in which level adjusting tools 2 are screwed onto the lower ends of the legs at the four corners, and 3 is a device mount. 1 is a horizontal rotary plate which is pivotally attached to the central part of the top plate and is automatically rotatable via a motor. 4 is a horizontal shaft rotator with a motor installed vertically at the center of the top plate of the horizontal rotary plate 3. 5 is a horizontal shaft rotation. The horizontal axis of the container 4 is a movable support board 6 in which the legs 7 are fitted to the horizontal axis 5. Reference numerals 8 and 9 denote slit light emission sources arranged in the central portion of the top plate of the support board 6 along the X-axis and Z-axis directions, respectively, and orthogonally to each other. 10 denotes slit light emission sources 8 and 9 on the top plate. Half mirrors arranged at the intersections of the respective extension lines, 11 a slit light focus mechanism arranged in front of the half mirror 10, and 12 a slit light emission source 8 to a slit light focus mechanism 11 formed in cooperation with each other. Cross laser markers 13 and 13 are cross marks projected on the object to be measured 14 by the cross laser marker 12. Reference numeral 15 is a pair of XZ fine movement stages, which are arranged at equal distances on both sides of the cross laser marker 12 on the top plate.
6 is a horizontal turntable for a camera which is pivotally supported on an XZ fine movement stage 15 and is rotatable via a motor, 17 is respectively mounted on a horizontal turntable 16 for the camera, and an optical axis 18 is an optical axis of the cross laser marker 12. A pair of CCD cameras aligned on the same plane as 19 and a camera zoom focus mechanism 20 arranged in front of the CCD camera.

In such an apparatus, the cross laser marker 12 is provided with slit light emission sources 8 and 9 as shown in the partially enlarged plan view of FIG. 2, and cylindrical lenses 21 and 22 are provided at the front ends thereof, respectively. This makes the spot light of the laser linear from a point to create slit light. At this time, the two cylindrical lenses 21 and 22 are turned 90 degrees so that the slit light of the cylindrical lens 21 is in the vertical direction and the slit light of the cylindrical lens 22 is in the horizontal direction, thereby creating vertical and horizontal slit light, This is combined by the half mirror 10 to be in one direction, so that a cross slit light is created. Focusing after irradiating the surface of the object to be measured 14 with this is performed by the slit light focus mechanism 11. For measurement, as shown in the plan view of FIG. 3 and the side view of FIG. 4, the optical axis 19 of the slit light and the optical axes 10, 10 of the cameras are aligned on the same plane, and the slit light is placed in the center of the two CCD cameras 17. By setting, measurement can be simplified. That is, assuming that the directions of looking at the point A on the front are the origins of the horizontal turntable 3 and the horizontal axis 5, respectively, when measuring the point B, the horizontal turntable 3 is at an angle θ _B , the horizontal axis 5 is at an angle γ _B , When measuring the point C, set the horizontal turntable 3 to the angle θ _C and the horizontal axis 5 to the angle γ _C.
Just rotate each one. At this time, the optical axes 10, 10 of the CCD cameras 17, 17 are moved so as to draw an isosceles triangle having the measurement point A, B or C as the apex. That is, the inclinations of the left and right optical axes 10, 10 are always equal, and the angle θ _1A = angle θ _2A , θ _1B = θ _2B , θ _1C = θ
It becomes _2C . The alignment of the angles θ ₁ and θ ₂ of the optical axes 10 and 10 of the cameras 17 and 17 is performed by the CCD cameras 17 and 17, respectively.
CC so that the cross mark 13 comes to the center of the image captured in CC
It is necessary to move the D cameras 17 and 17, respectively. However, at this time, the optical axes 1 of the left and right CCD cameras 17, 17 are
Since the slopes of 0 and 10 can be the same, either CC
With the D camera 17 as a reference, the other CCD camera 17 needs to follow it and swing by the same angle, which is simpler than the method of controlling each independently.
Moreover, the processing speed becomes faster. The camera zoom / focus mechanism 20 shown in FIG. 1 positions the cross mark 13 at the center of the image. This is done by setting the zoom to the widest position and moving the horizontal axis where the entire field of view is visible to perform so-called centering. Next, the zoom is tilted, the field of view is expanded, and the horizontal axis is adjusted until the zoom is fully tilted. By accurately positioning the cross mark 13 in the center of the image, it is possible to perform measurement without the need for an auxiliary range finder. In other words, in the known one, the shift on the image is caused by the zoom ratio and the pixel ratio (pixel dot and mm
Since the zoom does not change linearly, a rangefinder or software for linearizing is required. Focusing is performed by image processing for both the slit light and the CCD camera 17. This is done by taking the difference between the position of the cross mark 13 and the position of the other position of the signal of the brightness level input to the image so that it becomes maximum, and adjusting this alternately with the slit light and the CCD camera 17. The position of the measurement point is determined by a predetermined known inter-camera distance L serving as a reference, the angle θ of the operated horizontal turntable 3, the rotation angle γ of the horizontal axis 5, the CCD.
The three-dimensional position can be specified by the horizontal rotation angle θ ₁ (θ ₂ ) of the camera 17.

According to the apparatus of this embodiment, the following effects can be obtained. (1) Since the movable support board supported in the center of the horizontal turntable so that it can be tilted back and forth through the horizontal axis, it is possible to measure any point of the three-dimensional object to be measured. improves. (2) A pair of slit light emitting sources orthogonally arranged in the central portion of the top surface of the support board, half mirrors arranged at intersections of extension lines of the slit light emitting sources, and front of the half mirrors. A cross-shaped laser marker composed of a slit optical focus arranged on the top surface of the support plate, a horizontal rotary plate for the camera arranged equidistantly on both sides of the cross-shaped laser marker on the top surface of the support plate, and a horizontal plate for each camera. Provided are a pair of CCD cameras mounted on a rotating disk, each optical axis of which is on the same plane as the optical axis of the cross laser marker, and a camera zoom focus mechanism attached to the front end of each CCD camera. Device and control are simplified, thus reducing device cost and man-hours. (3) The cooperation of the above (1) and (2) promotes the automation of the device, so that the measurement accuracy is improved and the measurement man-hour is reduced, and therefore the economical efficiency is improved.

[0010]

In summary, according to the present invention, the movable supporting plate supported in the central portion of the horizontal rotating plate so as to be tiltable forward and backward through the horizontal axis, and the movable supporting plate disposed orthogonally to the central portion of the top surface of the supporting plate. A pair of slit light emitting sources, a half mirror arranged at intersections of extension lines of the slit light emitting sources, and a cross laser marker arranged in front of the half mirrors, and the supporting board. On the top surface of the cross laser marker, which are equidistant from each other on both sides of the cross laser marker, and the optical axes of the cross laser markers mounted on the horizontal rotary disks of the cameras. And a pair of CCD cameras on the same plane and a camera zoom focus mechanism attached to the front ends of the CCD cameras, respectively, to measure the object to be measured by the triangulation method, Software is simple and sure the visibility of the same point, thus from getting economy, the three-dimensional shape measurement device which is excellent in rapidity and reliability, the present invention is the extremely valuable industrial.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

2 is a plan view showing the cross laser marker of FIG. 1. FIG.

FIG. 3 is a plan view showing the principle of the device of the present invention.

FIG. 4 is a side view of FIG.

FIG. 5 is a perspective view showing a known three-dimensional shape measuring apparatus.

[Explanation of symbols]

1 Device Stand 2 Level Adjuster 3 Horizontal Rotating Plate 4 Horizontal Axis Rotator 5 Horizontal Axis 6 Supporting Plate 7 Leg 8 Slit Light Emitting Source 9 Slit Light Emitting Source 10 Half Mirror 11 Slit Light Focusing Mechanism 12 Cross Laser Marker 13 Cross Mark 14 object to be measured 15 X-Z fine movement stage 16 horizontal turntable for camera 17 CCD camera 18 optical axis 19 optical axis 20 camera zoom focus mechanism 21 cylindrical lens 22 cylindrical lens A point B point C point L distance between cameras θ _1A angle θ _2A angle θ _B angle θ _C angle γ _B angle γ _C angle

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Kazuhiko Kamo 1-1-1, Wadasaki-cho, Hyogo-ku, Kobe Sanbishi Heavy Industries Ltd. Kobe Shipyard (72) Inventor Keiji Ohara Wadazaki-cho, Hyogo-ku, Kobe 1-chome Sanritsu Heavy Industries Co., Ltd. Kobe Shipyard

Claims (1)

Claim: What is claimed is: 1. A movable support plate, which is supported in a central portion of a horizontal turntable via a horizontal shaft so as to be capable of tilting forward and backward, and is orthogonally arranged in a central portion of the top surface of the support plate. A cross laser marker consisting of a pair of slit light emitting sources, a half mirror arranged at the intersection of the extension lines of each slit light emitting source, and a slit light focus arranged in front of the half mirror, and the supporting disc. Horizontal turntables for cameras arranged on the top surface at equal distances on both sides of the cross laser marker, and optical axes respectively mounted on the horizontal turntables for cameras and optical axes of the cross laser markers. A pair of CCDs on the same plane
A three-dimensional shape measuring apparatus comprising a camera and a camera zoom focus mechanism attached to the front end of each CCD camera to measure an object to be measured by a triangulation method.